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AC Electrokinetic Phenomena Generated by Microelectrode Structures
Published on: July 28, 2008
Fabrication of microelectrodes using the lift-off technique
Benjamin Y Park1, Rabih Zaouk, Marc J Madou
1Department of Mechanical Engineering, University of California-Irvine, USA.
Methods in Molecular Biology (Clifton, N.J.)
|March 2, 2006
Abstract:
The lift-off technique is one of the most prevalent methods for fabricating microelectrodes on a flat surface (e.g., a silicon [Si] wafer). It represents an alternative for metal-etching techniques that often utilize hazardous chemicals in order to define a pattern. This chapter presents an example of patterning gold electrodes on an Si wafer.
