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Related Experiment Videos

Rugate filter made with composite thin films by ion-beam sputtering.

Cheng-Chung Lee1, Chien-Jen Tang, Jean-Yee Wu

  • 1Thin Film Technology Center and Institute of Optical Sciences, National Central University, Chung-Li 32001, Taiwan, China. cclee@ios.ncu.edu.tw

Applied Optics
|March 17, 2006
PubMed
Summary

Researchers created tunable Ta-Si oxide films using sputtering, achieving refractive indices from 1.48 to 2.15. These amorphous films, with low roughness, enabled the design and fabrication of rugate filters.

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Area of Science:

  • Materials Science
  • Optics
  • Thin Film Technology

Background:

  • Ta-Si oxide films offer tunable optical properties.
  • Controlling film inhomogeneity is crucial for optical filter design.

Purpose of the Study:

  • To fabricate Ta-Si oxide composite films with a range of refractive indices.
  • To investigate the properties and inhomogeneity of these composite films.
  • To design and fabricate a rugate filter using the developed films.

Main Methods:

  • Radio frequency (rf) ion-beam sputtering was employed for film deposition.
  • Film properties including refractive index and surface roughness were characterized.
  • Automatic computer control was utilized for rugate filter fabrication.

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Main Results:

  • Composite films exhibited refractive indices tunable between 1.48 and 2.15.
  • All deposited films were amorphous with a surface roughness below 0.3 nm.
  • A functional rugate filter was successfully designed and fabricated.

Conclusions:

  • Ta-Si oxide composite films are suitable for optical applications requiring tunable refractive indices.
  • The sputtering method allows for precise control over film properties.
  • Automated fabrication enables the creation of complex optical filters like rugate filters.