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Updated: Jul 13, 2026

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

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Published on: February 27, 2013

Light-scattering characterization of transparent substrates.

Myriam Zerrad¹, Carole Deumié, Michel Lequime

¹Institut Fresnel, Unité Mixte de Recherche-CNRSTIC 6133, Ecole Généraliste d'Ingénieurs de Marseille, Université Paul Cézanne Aix-Marseille I, Domaine Universitaire de St. Jérôme, 13397 Marseille Cedex 20, France. myriam.zerrad@fresnel.fr

|March 17, 2006

Summary

Angle-resolved light scattering now quantifies surface roughness on transparent substrates. This new method overcomes limitations of traditional techniques for superpolished optical components.

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Area of Science:

Optical Engineering
Materials Science

Background:

Angle-resolved light scattering (ARLS) is a long-established technique for surface roughness quantification.
Traditional ARLS is limited to opaque samples due to interface interference.

Purpose of the Study:

To adapt ARLS for transparent substrates.
To enable surface characterization of superpolished optical components.

Main Methods:

Development of a modified ARLS approach.
Application to superpolished transparent substrates.

Main Results:

Successfully applied ARLS to transparent substrates.
Overcame limitations of interface interference.

Conclusions:

ARLS can be effectively used for transparent optical components.
Enables precise surface roughness characterization of superpolished materials.