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Updated: Aug 10, 2026

10:23
A Machine-Vision Approach to Transmission Electron Microscopy Workflows, Results Analysis and Data Management
Published on: June 23, 2023
Improved rate control for electron-beam evaporation and evaluation of optical performance improvements
Michael Gevelber1, Bing Xu, Douglas Smith
1Manufacturing Engineering, Boston University, 15 Saint Mary's Street, Brookline, Massachusetts 02446, USA.
Applied Optics
|March 17, 2006
Abstract:
A new deposition-rate-control and electron-beam-gun (e-gun) strategy was developed that significantly reduces the growth-rate variations for e-beam-deposited SiO2 coatings. The resulting improvements in optical performance are evaluated for multilayer bandpass filters. The adverse effect of uneven silica-source depletion on coating spectral performances during long deposition runs is discussed.

