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Updated: Aug 10, 2026
Preparation of Silica Nanoparticles Through Microwave-assisted Acid-catalysis
Published on: December 16, 2013
Preparation of high-performance optical coatings with fluoride nanoparticle films made from autoclaved sols
Tsuyoshi Murata1, Hitoshi Ishizawa, Izumi Motoyama
1Department of Lens Engineering Development, Production Technology Headquarters, Core Technology Center, Nikon Corporation, 10-1, Asamizodai 1-chome, Sagamihara, Kanagawa 228-0828, Japan. murata.go@nikon.co.jp
Abstract:
An ultralow refractive index is very advantageous when one designs antireflective coatings. We successfully obtained high-quality MgF2 thin films with ultralow refractive indices from autoclaved sols prepared from magnesium acetate and hydrofluoric acid. The MgF2 films consist of nanosized particles, and they have high laser-exposure durability at 193 nm. The reflectance of the antireflective coating with five layers, of which the top layer is formed by our method, is lower than 0.6% in the incident angle range of 0 degrees - 60 degrees at 193 nm.
