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Related Experiment Videos

High-performance coatings for micromechanical mirrors.

Alexandre Gatto1, Minghong Yang, Norbert Kaiser

  • 1Fraunhofer Institut für Angewandte Optik und Feinmechanik, Albert Einstein Strasse 7, Jena 07745, Germany. a.gatto@zeiss.de

Applied Optics
|March 17, 2006
PubMed
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New high-performance coatings for micromechanical mirrors offer excellent reflectivity across a wide spectral range. These coatings are compatible with micro-optics and electronics systems for advanced applications.

Area of Science:

  • Materials Science
  • Optical Engineering
  • Microelectromechanical Systems

Background:

  • Micromechanical mirrors are crucial components in various optical systems.
  • Existing coatings often face limitations in spectral range, optical performance, or mechanical durability.
  • Integration into Micro-Opto-Electro-Mechanical Systems (MOEMS) requires specific material properties.

Purpose of the Study:

  • To develop advanced, high-performance coatings for micromechanical mirrors.
  • To achieve high reflectivity across a broad spectral range, from near-infrared to vacuum-ultraviolet.
  • To ensure coatings possess suitable mechanical properties and are compatible with semiconductor manufacturing.

Main Methods:

  • Development of novel high-reflective metal coating systems.

Related Experiment Videos

  • Integration studies within MOEMS architectures, including spatial light modulators and microscanning mirrors.
  • Characterization of optical performance, mechanical properties, and CMOS compatibility.

    • Main Results:

    • Successful development of high-performance coatings for micromechanical mirrors.
    • Demonstrated high reflectivity spanning from near-infrared to vacuum-ultraviolet spectral regions.
    • Achieved a balance of excellent optical performance, robust mechanical properties, and CMOS compatibility.

    Conclusions:

    • The developed metal coating systems meet the demanding requirements for advanced micromechanical mirrors.
    • These coatings enable enhanced functionality in MOEMS devices across diverse spectral applications.
    • The findings pave the way for next-generation optical systems leveraging integrated micro-mirror technology.