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Updated: Aug 10, 2026
TiO2-coated Hollow Glass Microspheres with Superhydrophobic and High IR-reflective Properties Synthesized by a Soft-chemistry Method
Published on: April 26, 2017
High-performance coatings for micromechanical mirrors
Alexandre Gatto1, Minghong Yang, Norbert Kaiser
1Fraunhofer Institut für Angewandte Optik und Feinmechanik, Albert Einstein Strasse 7, Jena 07745, Germany. a.gatto@zeiss.de
Abstract:
High-performance coatings for micromechanical mirrors were developed. The high-reflective metal systems can be integrated into the technology of MOEMS, such as spatial light modulators and microscanning mirrors from the near-infrared down to the vacuum-ultraviolet spectral regions. The reported metal designs permit high optical performances to be merged with suitable mechanical properties and fitting complementary metal-oxide semiconductor compatibility.
