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Updated: Jul 18, 2026
Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
Published on: July 26, 2016
Fabrication and characterization of epitaxial Ba0.7Sr0.3TiO3 thin films for optical waveguide applications
Dan-Yang Wang1, Helen Lai Wa Chan, Chung Loong Choy
1Department of Applied Physics and Material Research Centre, The Hong Kong Polytechnic University, Hung Hoem, Kowloon, Hong Kong, China. 0201276r@polyu.edu.hk
Abstract:
The optical properties of barium strontium titanate (Ba0.7Sr0.3TiO3; BST) thin films are described. The BST thin films were epitaxially grown upon MgO (001) substrates by pulsed laser deposition. The crystallographic properties of the BST thin films were examined by x-ray diffraction. The BST thin films were highly optically transparent in the visible region. The optical waveguide properties were characterized by a prism coupling technique. An inverse-WBK method was employed to determine the refractive-index profile along the thickness of the BST films. Optical losses were measured by a moving fiber method, and the optical losses were found to be 0.93 dB/cm for the TE0 mode and 1.29 dB/cm for the TM0 mode at 1550 nm. Electro-optic (E-O) properties were measured by a phase-modulation detection method at 632.8 nm, and the BST films exhibited a predominantly quadratic E-O effect with a quadratic E-O coefficient of 6.64 x 10(-18) m2/V2.
