Precision measurement with visual feedback using binary phase diffractive optical elements

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Updated: Aug 3, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
10:28

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

Edward Buckley1, Adrian Cable, Tim Wilkinson

  • 1Engineering Department, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, UK. ebuckley@iee.org

Optics Letters
|April 22, 2006
PubMed

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