Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light

Area of Science:

• Optics and Photonics
• Microscopy
• Laser Technology

Background:

• Traditional microscopy techniques face limitations in achieving high spatial resolution.
• The development of advanced imaging tools is crucial for scientific discovery and industrial inspection.

Purpose of the Study:

• To demonstrate a novel tabletop extreme-ultraviolet microscope for high-resolution imaging.
• To achieve spatial resolution better than 38 nm using a compact system.

Main Methods:

• Utilized a high-brightness tabletop laser emitting 13 nm wavelength light.
• Employed Fresnel zone plate optics for focusing and imaging.
• Acquired images with a spatial resolution exceeding previous benchmarks.

Main Results:

• Achieved a spatial resolution better than 38 nm.
• Demonstrated the capability of a compact extreme-ultraviolet imaging system.
• Established a foundation for picosecond time-resolved imaging.

Conclusions:

• The developed tabletop microscope offers a pathway to compact and accessible extreme-ultraviolet imaging.
• This technology promises 15-20 nm spatial resolution for inspecting samples in various environments.
• The system paves the way for next-generation imaging tools with enhanced temporal resolution.