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Updated: Aug 8, 2026
In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx
Published on: May 13, 2020
Scalable multichannel micromachining with pseudo-nondiffracting vacuum ultraviolet beam arrays generated by thin-film
Ruediger Grunwald1, Uwe Neumann, Arkadi Rosenfeld
1Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie, Berlin, Germany. grunwald@mbi-berlin.de
Abstract:
Scalable multichannel microstructuring was demonstrated by multiplexing a focused molecular fluorine laser beam with cylindrical nanolayer microaxicons into an array of converging pseudo-nondiffracting subbeams. The axicons were fabricated by shadow-mask vapor deposition of magnesium fluoride onto substrates of identical material. Long-period surface gratings of variable pitch were generated on poly(methyl methacrylate) by varying the target position within the converging periodic focal lines.
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