Piezoelectric linear motor concepts based on coupling of longitudinal vibrations

Classically, rotary motors with gears and spindle mechanisms are used to achieve translatory motion. In means of miniaturization and weight reduction piezoelectric linear motors are of interest. Several ultrasonic linear motors found in literature base on the use of two different vibration modes. Most often flexural and longitudinal modes are combined to achieve an elliptic micro-motion of surface points. This micro-motion is converted to direct linear (or translatory) motion of a driven slider. To gain high amplitudes of the micro-motion and thus having a powerful motor, the ultrasonic vibrator should be driven near the eigenfrequency of its modes. Additionally, low mechanical and electrical losses lead to increased efficiency and large amplitude magnification in resonance. This demands a geometrical design that fits the eigenfrequencies of the two different modes. A frequency-deviation of only a few percent leads to non-acceptable disturbance of the elliptical motion. Thus, the mechanical design of the vibrators has to be done very carefully. Within this contribution we discuss different motor designs based on the coupling of two the same longitudinal vibrations within one structure to generate an elliptic motion of surface points. Different concepts based on piezoelectric plates and Langevin transducers are compared. Benefits and drawbacks against the combination of longitudinal and bending modes will be discussed. Numerical results of the stator vibration as well as motor characteristics are validated by measurements on different prototypes.