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Updated: Aug 7, 2026

Three-dimensional Optical-resolution Photoacoustic Microscopy
Published on: May 3, 2011
Combined surface-focused acoustic microscopy in transmission and scanning ultrasonic holography
Evgeny Twerdowski1, Moritz von Buttlar, Nasser Razek
1University of Leipzig, Institute of Experimental Physics II, D-04103 Leipzig, Germany. twerdowski@physik.uni-leipzig.de <twerdowski@physik.uni-leipzig.de>
Abstract:
Employment of ultrasound techniques in nondestructive testing may require identification of the acoustic modes contributing to imaging. Such identification can be achieved, with some restrictions, by time-of-flight analysis. Another approach is acoustic holography that reveals the propagation properties of any selected mode. In anisotropic media, the propagation features are distinct and allow for a reliable classification of the selected mode. Both techniques were applied for classification of bonded, disbonded, and weakly bonded areas in directly bonded semiconductor wafers.
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