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Updated: Aug 7, 2026

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Published on: May 11, 2019
Photoinduced hydrophilicity of heteroepitaxially grown ZnO thin films
M Miyauchi1, A Shimai, Y Tsuru
1Research Institute, TOTO Ltd., 2-8-1 Honson, Chigasaki-shi, Kanagawa, 253-8577, Japan. masahiro.miyauchi@toto.co.jp
Abstract:
Single crystalline ZnO thin films were heteroepitaxially grown on sapphire substrates by rf-magnetron sputtering. The ZnO films on sapphire A and C face were oriented along the (0001) direction, whereas the ZnO film on sapphire R face was oriented along the (11-20) direction. The rate of photoinduced hydrophilic conversion strongly depended on the surface crystal structure. The ZnO film oriented along the (11-20) direction exhibited a higher hydrophilicizing rate than those oriented along the (0001) direction. The high hydrophilicizing rate of the ZnO oriented along the (11-20) direction is due to its surface atomic arrangement. The outermost layer of the ZnO surface of the (11-20) face contains oxygen ions, which are considered to be energetically reactive sites and responsible for the hydrophilic conversion.
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