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Phase-stepped gauge block interferometry using a frequency-tunable visible laser diode.

Michael O'Hora1, Brian Bowe, Vincent Toal

  • 1Centre for Industrial and Engineering Optics, Dublin Institute of Technology, Kevin Street, Dublin 8, Ireland. mohora@dit.ie

Applied Optics
|July 21, 2006
PubMed
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This study presents a novel method for precise phase stepping in optical metrology using a frequency-locked diode laser and a Fabry-Perot interferometer. This technique enhances gauge block interferometry accuracy for surface form mapping.

Area of Science:

  • Optical Metrology
  • Interferometry
  • Laser Technology

Background:

  • Injection diode lasers offer economical phase-stepping interferometry but suffer from frequency instability.
  • Gauge block interferometry demands precise, repeatable phase steps on discontinuous surfaces over long paths.

Purpose of the Study:

  • To develop a stable and precise phase-stepping method for gauge block interferometry.
  • To overcome the limitations of intrinsic laser frequency instability in metrology applications.

Main Methods:

  • Utilizing a visible injection diode laser frequency-locked with a Fabry-Perot interferometer.
  • Modulating the Fabry-Perot interferometer length to generate proportional, repeatable phase steps.
  • Implementing the method with a Fizeau-type gauge block interferometer.

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Main Results:

  • Achieved a phase measurement resolution of 0.005 lambda.
  • Successfully mapped the surface form of gauge blocks up to 100 mm.
  • Enabled objective assessment of surface shape parameters.

Conclusions:

  • The frequency-locking method significantly improves precision and repeatability in phase-stepping interferometry.
  • This technique is effective for high-resolution surface metrology of gauge blocks.