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Updated: Aug 6, 2026

Preparation and Observation of Thick Biological Samples by Scanning Transmission Electron Tomography
Published on: March 12, 2017
Three-dimensional ADF imaging of individual atoms by through-focal series scanning transmission electron microscopy
Klaus van Benthem1, Andrew R Lupini, Mark P Oxley
1Condensed Matter Sciences Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6031, USA. benthem@ornl.gov
Abstract:
Aberration correction in scanning transmission electron microscopy has more than doubled the lateral resolution, greatly improving the visibility of individual impurity or dopant atoms. Depth resolution is increased five-fold, to the nanometer level. We show how a through-focal series of images enables single Hf atoms to be located inside an advanced gate dielectric device structure to a precision of better than 0.1 x 0.1 x 0.5 nm. This depth sectioning method for three-dimensional characterization has potential applications to many other fields, including polycrystalline materials, catalysts and biological structures.
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