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Updated: Dec 20, 2025

Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers
Published on: February 8, 2022
Formation of silver nanoparticles and nanocraters on silicon wafers
1Frontier Research System, The Institute of Physical and Chemical Research (RIKEN), Hirosawa 2-1, Wako, Saitama, 351-0198 Japan.
Abstract:
Silver nanocraters and monodisperse nanoparticles were formed on silicon wafers by spin-coating of an aqueous AgNO3/PVA solution and calcination of the resulting Ag+/PVA composite film. The monodisperse Ag nanoparicles were formed from small Ag+/PVA aggregates and were uniformly and stably distributed on the substrate surface. They were located as close as 2.8 nm apart (edge to edge) without coalescence. This nanoparticle stability was apparently derived from their interaction with the oxidized wafer surface. On the other hand, Ag metallic nanocraters with and without nanodots at their centers were produced from large Ag+/PVA aggregates. The explosive decomposition of AgNO3 and PVA by calcination could explain their formation. When Ag+ ions were reduced to Ag nanoparticles prior to calcination, larger Ag nanoparticles were produced probably due to aggregation of closely situated nanoparticles. Those nanoparticles that were located far enough stayed intact. Perspectives are discussed in terms of potential applications.

