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Cooling Rate Dependent Ellipsometry Measurements to Determine the Dynamics of Thin Glassy Films
Published on: January 26, 2016
Model-independent method for the determination of guiding thin-film optical parameters
Ildar Salakhutdinov1, Yuriy Danylyuk, Kalyani Chaganti
1Department of Electrical and Computer Engineering, Wayne State University, Detroit, Michigan 48202, USA. ildar@eng.wayne.edu
Applied Optics
|August 24, 2006
Abstract:
A method for the determination of the optical constants of thin films based on the combination of a waveguide measurement procedure with the spectroscopic measurements made from the UV to the IR is presented. As a test material AlN thin film on sapphire substrates is investigated.
