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Updated: Jul 20, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

Systematic design approach for capacitively coupled microelectromechanical filters.

Ari T Alastalo¹, Ville Kaajakari

¹VTT Technical Research Center of Finland, Tietotie 3, Espoo, FIN-02150, Finland. ari.alastalo@vtt.fi

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

|September 13, 2006

Summary

Designing microelectromechanical (MEMS) band-pass filters requires balancing carrier-to-interference ratio (C/I) and insertion loss. An integrated receiver architecture offers a more feasible approach for handheld terminals than traditional 50-ohm impedance matching.

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Area of Science:

Electrical Engineering
Materials Science
Mechanical Engineering

Background:

Microelectromechanical (MEMS) band-pass filters are crucial components in modern communication systems.
Designing these filters involves trade-offs between critical performance metrics like carrier-to-interference ratio (C/I) and insertion loss.
Existing design procedures often struggle to meet the stringent requirements of handheld communication terminals.

Purpose of the Study:

To formulate a design procedure for MEMS band-pass filters that incorporates C/I and insertion loss specifications.
To identify a feasible compromise between C/I and insertion loss for optimal filter performance.
To evaluate the suitability of different receiver architectures for meeting typical handheld terminal specifications.

Main Methods:

Development of a design procedure for MEMS band-pass filters.
Analysis of the trade-offs between intermodulation distortion suppression (affecting C/I) and insertion loss.
Investigation of integrated receiver architectures with non-50-ohm impedance matching.

Main Results:

A design procedure is established to manage competing C/I and insertion loss requirements.
Suppressing intermodulation distortion to enhance C/I often increases insertion loss, necessitating a balanced design approach.
Integrated receiver architectures allowing flexible impedance matching are more effective than fixed 50-ohm terminations for handheld applications.

Conclusions:

Achieving optimal MEMS band-pass filter performance requires a design strategy that balances C/I and insertion loss.
Integrated receiver architectures are superior for meeting the demanding specifications of handheld communication terminals.
The proposed design procedure facilitates the creation of high-performance MEMS filters for mobile devices.