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Published on: February 12, 2017
Nanoscale patterning on insulating substrates by critical energy electron beam lithography
Jaebum Joo1, Brian Y Chow, Joseph M Jacobson
1The Center for Bits and Atoms, MIT Media Laboratory, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA.
Nano Letters
|September 14, 2006
Summary
This study introduces critical energy electron beam lithography to create nanometer patterns on insulators, eliminating charging issues. This technique enables precise patterning for advanced electronics without complex equipment.
Area of Science:
- Materials Science
- Nanotechnology
- Physics
Background:
- Electron beam lithography (EBL) is crucial for nanoscale patterning.
- Insulating substrates and wide band gap materials present challenges due to charging effects.
- Existing methods to mitigate charging require complex setups like conductive layers or specialized columns.
Purpose of the Study:
- To present a novel method for generating nanometer-scale patterns on insulating materials using electron beam lithography.
- To eliminate charge-induced distortions in EBL on insulators.
- To simplify the process and reduce the need for specialized equipment.
Main Methods:
- Utilizing critical energy electron beam lithography (CE-EBL) operating at the E2 energy.
- Implementing a 'scan square' method to identify the critical energy.
- Patterning 65 nm poly(methyl methacrylate) on glass substrates.
Main Results:
- Achieved sub-100 nm feature resolution.
- Eliminated practically all charge-induced pattern distortions.
- Required low area doses as low as 10 microC/cm2 at 1.3 keV.
- Demonstrated patterning on insulating substrates without conductive layers.
Conclusions:
- CE-EBL offers a simplified and effective approach for high-fidelity nanoscale patterning on insulators.
- This method removes the need for charge dissipation layers or complex e-beam column configurations.
- Potential applications include high-density biochips, flexible electronics, and optoelectronics, enhancing low-voltage EBL fidelity.
