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Updated: Jul 19, 2026

Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers
Published on: February 8, 2022
Micropatterning of porous silicon films by direct laser writing
Yit-Lung Khung1, Sean D Graney, Nicolas H Voelcker
1School of Chemistry, Physics and Earth Sciences, Flinders University, GPO Box 2100, Adelaide, SA 5001 Australia.
Abstract:
In this study, we demonstrate that porous silicon films can be ablated by the pulsed nitrogen laser of a commercial MALDI mass spectrometer. The extent of laser-induced ablation was found to depend on the doping level and surface chemistry of the porous silicon film. Using direct laser writing with or without a mask, micropatterns were generated on the porous silicon surface. These micropatterns were subsequently used to guide the growth of mammalian cells including neuroblastoma. Excellent selectivity of cell growth toward the laser-ablated regions was established.

