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Updated: Jul 19, 2026

An Atmospheric Pressure Plasma Setup to Investigate the Reactive Species Formation
Published on: November 3, 2016
Direct observation and reactions of Cl3 radical
Shinichi Enami1, Takashi Yamanaka, Satoshi Hashimoto
1Department of Molecular Engineering, Kyoto University, Kyoto 615-8510, Japan.
Abstract:
The broad absorption of Cl3 radical was observed between 1150 and 1350 nm using cavity ring-down spectroscopy at 213-265 K and 50-200 Torr with He, N2, Ar, or SF6 diluents. The absorption intensity of Cl3 increased at lower temperature and higher pressure. SF6 was the most efficient diluent gas. The temperature dependent equilibrium constants for Cl3 formation from Cl+Cl2 were theoretically calculated at the MP4SDQ6-311+G(d) level. Observed decay time profiles of Cl3 and the pressure dependence of Cl3 formation are explained by the equilibrium reaction and a decay reaction of Cl+Cl3.
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