Development of computer-assisted minimal-dose system with beam blanker for TEM

Misa Hayashida1, Tsunenori Nomaguchi, Yoshihide Kimura

  • 1Department of Material and Life Science, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan. hayashida@atom.mls.eng.osaka-u.ac.jp

Micron (Oxford, England : 1993)
|October 19, 2006
PubMed
Summary

A new computer-assisted system minimizes electron dose for high-resolution transmission electron microscopy (TEM) of sensitive samples. This approach reduces radiation damage, enabling clearer imaging of delicate materials.