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Computer screen photoassisted off-null ellipsometry.

J W P Bakker1, H Arwin, I Lundström

  • 1Department of Physics, Chemistry and Biology, Linköping University, Linköping, Sweden. jimba@ifm.liu.se

Applied Optics
|October 28, 2006
PubMed
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This study demonstrates ellipsometric thickness measurement using a computer screen and webcam. Nanometer-scale thickness resolution is achieved with a novel, cost-effective optical setup.

Area of Science:

  • Optics and Photonics
  • Materials Science

Background:

  • Ellipsometry is a powerful optical technique for characterizing thin films.
  • Traditional ellipsometry setups can be complex and expensive.
  • Developing cost-effective and accessible ellipsometric methods is of interest.

Purpose of the Study:

  • To demonstrate a novel ellipsometric measurement of thickness.
  • To utilize a computer screen as a light source and a webcam as a detector.
  • To add imaging off-null ellipsometry to computer screen photoassisted techniques.

Main Methods:

  • Employed a computer screen as a tunable, large-area illumination source.
  • Utilized a standard webcam as the detector for optical measurements.
  • Implemented an imaging off-null ellipsometry approach.

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Main Results:

  • Achieved thickness resolution in the nanometer range.
  • Demonstrated good qualitative agreement with a simplified theoretical model.
  • Showcased the ability to tune illumination intensity across the sample.

Conclusions:

  • The developed setup offers a cost-effective alternative for ellipsometric thickness measurements.
  • The tunable illumination allows for a broad sensitivity range without compromising resolution.
  • This method expands the utility of computer screen photoassisted techniques in materials characterization.