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Updated: Jul 18, 2026

Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon
Published on: July 17, 2020
[Determination of trace germanium by HG-ICP and study on the medium influence]
Wei Jin1, Cheng-Yi Zhao, Hui Ma
1Analytical and Testing Center, Beijing Normal University, Beijing 100875, China.
Abstract:
A method to determine the content of trace germanium by hydride generation inductively coupled plasma atomic emission spectrometry was established. The influences of different acidic medium, concentration of NaBH4 and other concomitant elements are examined systemically. The optimal analytical conditions were discussed and examined. The detection limit is 0.2 ng x mL(-1) and the precision is 0.9%. The value of germanium content detected in environmental reference material agrees with the certified value. The medium influence on determining trace germanium was studied in detail.
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