Time-delay compensated monochromator in the off-plane mount for extreme-ultraviolet ultrashort pulses

The design of ultrafast monochromators using grazing-incidence gratings in the off-plane mount for the spectral selection of extreme-ultraviolet femtosecond pulses in a broad spectral region is presented. Their application in the selection of high-order laser harmonics is analyzed in detail. The main advantage of the off-plane mount is a much higher efficiency than that of the classical mount. It is shown that two-grating configurations preserve the length of the optical paths of different diffracted rays, maintaining the extremely short time duration of the pulse. Configurations with plane or toroidal gratings are discussed. As a test case, the design of a monochromator for the 17-61 nm region with a time compensation better than 1 fs is presented.