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Flextensional ultrasonic piezoelectric micro-motor.

Joni T Leinvuo1, Stephen A Wilson, Roger W Whatmore

  • 1VTI Technologies Oy, Vantaa, Finland. joni.leinvuo@vti.fi

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|December 26, 2006
PubMed
Summary

A novel piezoelectric ultrasonic micro-motor utilizes a composite stator with a metallic "cymbal" to convert vibrations into rotary motion. This innovative design achieves controlled speed and torque via electrical supply adjustments, demonstrating potential for micro-actuation applications.

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Area of Science:

  • * Microelectromechanical systems (MEMS)
  • * Piezoelectric actuators
  • * Ultrasonic motors

Background:

  • * Development of micro-scale rotary actuators is crucial for miniaturized devices.
  • * Standing wave ultrasonic motors offer precise motion control.
  • * Piezoelectric materials provide efficient electromechanical transduction.

Purpose of the Study:

  • * To present the design, construction, and operational characteristics of a new standing wave piezoelectric ultrasonic micro-motor.
  • * To investigate the conversion of piezoelectric vibrations into rotary motion using a composite stator.
  • * To evaluate the motor's performance, including speed, torque, and efficiency.

Main Methods:

  • * Fabrication of a composite stator comprising a metallic flex-tensional mode converter (cymbal) bonded to a piezoelectric plate.

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  • * Utilizing an elastic-fin friction drive mechanism for rotary actuation.
  • * Employing noncontact optical techniques, high-speed imaging, and image analysis for performance assessment.

    • Main Results:

    • * The micro-motor successfully converted contour-mode vibrations into rotational movement.
    • * Operational characteristics were determined from acceleration and deceleration data.
    • * Achieved a no-load output speed of 11 rev s⁻¹, stall torque of 27 nNm, and a maximum efficiency of 0.6%.

    Conclusions:

    • * The developed piezoelectric ultrasonic micro-motor demonstrates a viable approach for micro-scale rotary actuation.
    • * Single-phase electrical supply allows for direct control of output speed and torque.
    • * Further optimization is needed to enhance the motor's efficiency for practical applications.