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Wafer-scale Ni imprint stamps for porous alumina membranes based on interference lithography

Woo Lee1, Ran Ji, Caroline A Ross

  • 1Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany. woolee@mpi-halle.de

Small (Weinheim an Der Bergstrasse, Germany)
|December 29, 2006
PubMed
Abstract

No abstract available in PubMed .

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