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Updated: Jul 17, 2026

DNA Origami-Mediated Substrate Nanopatterning of Inorganic Structures for Sensing Applications
Published on: September 27, 2019
Molecular beam deposition of DNA nanometer films
Joshua A Hagen1, Wei-Xin Li, Hans Spaeth
1Nanoelectronics Laboratory, University of Cincinnati, Cincinnati, Ohio 45221-0030, USA.
Abstract:
The development of novel photonic devices which incorporate biological materials is strongly tied to the development of thin film forming processes. Solution-based ("wet") processes when used with biomaterials in device fabrication suffer from dissolution of underlying layers, incompatibility with clean environment, inconsistent film properties, etc. We have investigated ultra-high-vacuum molecular beam deposition of surfactant-modified deoxyribonucleic acid (DNA). We have obtained effective deposition rates of approximately 0.1-1 A/s, enabling reproducible and controllable deposition of nanometer-scale films.

