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Updated: Jul 17, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Ultrafast extreme ultraviolet holography: dynamic monitoring of surface deformation
Ra'anan I Tobey1, Mark E Siemens, Oren Cohen
1Department of Physics and JILA, University of Colorado and NIST, and NSF Engineering Research Center in Extreme Ultraviolet Science and Technology, Boulder, Colorado 80309-0440, USA. Ra.Tobey@colorado.edu
Abstract:
We demonstrate femtosecond time-resolved dynamic Gabor holography using highly coherent extreme ultraviolet light generated by high harmonic upconversion of a femtosecond laser. By reflecting this light from an impulsively heated surface, we implement a simple and robust single-reflection geometry for phase-sensitive holographic detection at extreme UV wavelengths. Using this setup, we study the ultrafast deformation and subsequent acoustic oscillations within a thin metal film. These measurements exhibit subpicometer spatial sensitivity in the vertical dimension.

