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Updated: Jul 17, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
SAW filters based on parallel-connected coupled resonator filters with offset frequencies
Johanna Meltaus1, Victor P Plessky, Sanna Härmä
1Optics and Molecular Materials Laboratory, Helsinki University of Technology, Espoo, FIN-02015 HUT, Finland. Johanna.Meltaus@tkk.fi
Abstract:
The concept of coupled resonators is applied to synthesize surface acoustic wave filters. Employing two parallel-connected filter tracks, with a frequency shift imposed between them, a wide passband with low insertion loss together with well-controlled rejections is achieved. The operation of the two-track device is based on the mutual interaction of the individual transfer functions for the pair of tracks. Each track serves to contribute a part of the passband, enabling a wide band. Outside of the passband, the signals passing through the two channels may cancel each other, thus facilitating efficient control over the rejections. However, obtaining rejection stopbands at just the predetermined frequencies requires precise values for the materials parameters and a reliable fabrication process. Prototype devices fabricated with this approach are demonstrated both on quartz and, for the first time, on 42 degrees-LiTaO3. Results for two-track devices having either two or three transducers per track and operating either single-ended or with a balanced output are presented. The devices are designed employing the coupling-of-modes model and transmission-matrix approach, and the separate tracks are optimized simultaneously and independently. The center frequencies are 868 MHz and 1960 MHz. On quartz, a minimum insertion loss of 4 dB and a passband width of 0.23% are achieved at 868 MHz. On 42 degrees-LiTaO3, the corresponding figures of merit are 1.3 dB for minimum insertion loss and 4.1% bandwidth at 1960 MHz. The filters on 42 degrees-LiTaO3 also have remarkably flat passbands.
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