The design and fabrication of two-dimension multi-electrodes array chip and system

Area of Science:

• Bioelectronic Engineering
• Materials Science
• Neuroscience

Background:

• Accurate recording and stimulation of cellular and tissue electrical activity are crucial for understanding biological systems.
• Existing multielectrode-array (MEA) technologies face challenges in scalability and signal fidelity.

Purpose of the Study:

• To design and fabricate a planar 64-channel MEA chip using micro-electro-mechanical-systems (MEMS) processes.
• To evaluate the chip's capability for recording and stimulating biological signals from cells or tissue slices.
• To validate the performance of the MEA chip in detecting bioelectronic signals under various conditions.

Main Methods:

• Fabrication of a planar 64-channel MEA chip utilizing MEMS processes.
• Integration of an 8-multichannel recording system for signal verification.
• Characterization of electrode dimensions (20x20 µm or 40x40 µm) and spacing (200 µm or 140 µm).
• Protection of metal circuitry with a thin silicon dioxide layer.
• Direct Current (DC) measurements to confirm basic signal detection.
• Alternating Current (AC) measurements in physiological saline buffer to assess performance in a biological context.

Main Results:

• Successful fabrication of a 64-channel MEA chip using MEMS technology.
• Demonstration of the chip's ability to detect bioelectronic signals.
• Verification of normal performance in DC measurements.
• Confirmation of stable performance in AC conditions when immersed in physiological saline.

Conclusions:

• The developed 64-channel MEA chip is a viable platform for recording and stimulating biological signals.
• MEMS fabrication offers a scalable approach for producing advanced bioelectronic devices.
• The chip's robust design ensures reliable signal detection in relevant physiological environments.