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Published on: July 17, 2015
Nanobeam electron diffraction and high resolution imaging analysis of InN films grown on sapphire
Zongwen Liu1, Robert J Kinsey, Steven M Durbin
1Australian Key Centre for Microscopy and Microanalysis, The University of Sydney, New South Wales, Australia.
Abstract:
A JEOL JEM-3000F field emission, analytical, high-resolution transmission electron microscope (HRTEM) was used to study InN films grown on sapphire substrates. It was found that, while the InN films maintained the hexagonal (wurtzite) structure, InN nanodomains with a cubic (zincblende) structure were also formed in the films. Nanobeam electron diffraction techniques were applied for identification of the cubic phase. The identification of the cubic InN was confirmed by HRTEM structural imaging. The cubic InN nanodomains are 3-10 nm in diameter, and are orientated in two different orientations with their [110](cubic) and [110](cubic) axes parallel to each other and their (111)(cubic) planes parallel to the (0001)(hex) plane of the hexagonal InN.
