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Updated: Jul 17, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Quantitative amplitude and phase contrast imaging in a scanning transmission X-ray microscope
Benjamin Hornberger1, Michael Feser, Chris Jacobsen
1Department of Physics and Astronomy, Stony Brook University, Stony Brook, NY 11794-3800, USA. benjamin.hornberger@stonybrook.edu
Abstract:
Phase contrast in X-ray imaging provides lower radiation dose, and dramatically higher contrast at multi-keV photon energies when compared with absorption contrast. We describe here the use of a segmented detector in a scanning transmission X-ray microscope to collect partially coherent bright field images. We have adapted a Fourier filter reconstruction technique developed by McCallum, Landauer and Rodenburg to retrieve separate, quantitative maps of specimen phase shift and absorption. This is demonstrated in the imaging of a germanium test pattern using 525eV soft X-rays.
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