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Fabrication of nanopores in silicon chips using feedback chemical etching

Sang Ryul Park1, Hongbo Peng, Xinsheng S Ling

  • 1Department of Physics, Brown University, Providence, RI 02912, USA.

Small (Weinheim an Der Bergstrasse, Germany)
|February 13, 2007
PubMed
Abstract

No abstract available in PubMed .

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