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Updated: Jul 17, 2026
Fabrication, Operation and Flow Visualization in Surface-acoustic-wave-driven Acoustic-counterflow Microfluidics
Published on: August 27, 2013
Micromachined Fabry-Pérot interferometer with embedded nanochannels for nanoscale fluid dynamics
Koen M van Delft1, Jan C T Eijkel, Dragana Mijatovic
1MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.
Abstract:
We describe a microfabricated Fabry-Pérot interferometer with nanochannels of various heights between 6 and 20 nm embedded in its cavity. By multiple beam interferometry, the device enables the study of liquid behavior in the nanochannels without using fluorescent substances. During filling studies of ethanol and water, an intriguing filling mode for partially wetting water was observed, tentatively attributed to the entrapment of a large amount of gas inside the channels.
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