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Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Jian Wang1, Harald D H Stöver, Adam P Hitchcock
1Department of Chemistry and Brockhouse Institute for Materials Research, McMaster University, Hamilton, ON, Canada L8S 4M1.
Chemically selective modification of polymer mixtures using soft X-rays allows for precise patterning. A polymethylmethacrylate (PMMA) and polyacrylonitrile (PAN) bilayer demonstrated high selectivity, enabling targeted removal or reduction of specific chemical groups.
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