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Updated: Jul 16, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
1Center for Sensor, Instrumentation and System Development, Technical University of Catalonia CD6-UPC, Terrassa, Spain. miguel.ares@oo.upc.edu
This study introduces a Shack-Hartmann wavefront sensor (SHWS) using a cylindrical microlens array for measuring highly aberrated wavefronts. Its unique line pattern detection extends measurement dynamic range, demonstrating capability with complex optics.
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