Related Experiment Video
Updated: Jul 16, 2026

An Alternative Approach for Sample Preparation with Low Cell Number for TEM Analysis
Published on: October 12, 2016
High-quality sample preparation by low kV FIB thinning for analytical TEM measurements
Sara Bals1, Wim Tirry, Remco Geurts
1Electron Microscopy for Materials Science, University of Antwerp, CGB, Groenenborgerlaan 171, B-2020 Antwerp, Belgium. Sara.Bals@ua.ac.be
Abstract:
Focused ion beam specimen preparation has been used for NiTi samples and SrTiO3/SrRuO3 multilayers with prevention of surface amorphization and Ga implantation by a 2-kV cleaning procedure. Transmission electron microscopy techniques show that the samples are of high quality with a controlled thickness over large scales. Furthermore, preferential thinning effects in multicompounds are avoided, which is important when analytical transmission electron microscopy measurements need to be interpreted in a quantitative manner. The results are compared to similar measurements acquired for samples obtained using conventional preparation techniques such as electropolishing for alloys and ion milling for oxides.
Related Concept Videos
Preparation of Samples for Electron Microscopy
Sample Preparation for Analysis: Overview
Bulk or large solid samples are typically reduced in size using grinding, crushing, or milling techniques to increase the...
Transmission Electron Microscopy
