Related Experiment Video
Updated: Jul 15, 2026

Microfluidic Platform with Multiplexed Electronic Detection for Spatial Tracking of Particles
Published on: March 13, 2017
Off-wafer fabrication and surface modification of asymmetric 3D SU-8 microparticles
Sarah L Tao1, Ketul Popat, Tejal A Desai
1Department of Physiology, University of California at San Francisco, Box 2520, 1700 4th Street, San Francisco, CA 94143, USA.
Abstract:
This protocol details a method of fabricating off-wafer, multilayered, asymmetric microparticles from the epoxy-based photosensitive polymer SU-8. Also included are methods for altering the surface properties of SU-8 and introducing functional groups for further covalent coupling reactions. These techniques may be used to create microparticles for applications in drug delivery and tissue engineering. Microparticle design, fabrication and surface modification can be completed in 2 d.

