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Updated: Jul 15, 2026
Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments
Published on: January 28, 2021
Development of a liquid tin microjet target for an efficient laser-produced plasma extreme ultraviolet source
Takeshi Higashiguchi1, Masaya Hamada, Shoichi Kubodera
1Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki, Gakuen Kibanadai Nishi 1-1, Miyazaki 889-2192, Japan. higashi@cc.utsunomiya-u.ac.jp
Abstract:
A regenerative tin liquid microjet target was developed for a high average power extreme ultraviolet (EUV) source. The diameter of the target was smaller than 160 microm and good vacuum lower than 0.5 Pa was maintained during the operation. A maximum EUV conversion efficiency of 1.8% at the Nd:yttrium-aluminum-garnet laser intensity of around 2 x 10(11) Wcm(2) with a spot diameter of 175 microm (full width at half maximum) was observed. The angular distribution of the EUV emission remained almost isotropic, whereas suprathermal ions mainly emerged toward the target normal.
