Related Experiment Video
Updated: Jul 15, 2026

11:14
Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Regular dislocation networks in silicon as a tool for nanostructure devices used in optics, biology, and electronics
M Kittler1, X Yu, T Mchedlidze
1IHP, Im Technologiepark 25, 15236 Frankfurt, Germany.
Small (Weinheim an Der Bergstrasse, Germany)
|April 13, 2007
Abstract:
Well-controlled fabrication of dislocation networks in Si using direct wafer bonding opens broad possibilities for nanotechnology applications. Concepts of dislocation-network-based light emitters, manipulators of biomolecules, gettering and insulating layers, and three-dimensional buried conductive channels are presented and discussed. A prototype of a Si-based light emitter working at a wavelength of about 1.5 microm with an efficiency potential estimated at 1% is demonstrated.

