Precise trajectory tracking of a piezoactuator-driven stage using an adaptive backstepping control scheme.

Area of Science:

• Control Systems Engineering
• Mechatronics
• Precision Motion Control

Background:

• Piezoactuator-driven stages exhibit complex hysteresis behavior, affecting precise motion control.
• Accurate modeling of hysteresis is crucial for achieving high-performance trajectory tracking.

Purpose of the Study:

• To propose an adaptive backstepping control scheme for precise trajectory tracking of piezoactuator-driven stages.
• To improve tracking performance, reduce steady-state errors, and enhance robustness to disturbances.

Main Methods:

• Modeling the piezoactuator stage dynamics, including hysteresis, using differential equations.
• Parameter identification using the Powell numerical optimization method.
• Developing a linear state-space model with Taylor series approximation of hysteresis.
• Implementing an adaptive backstepping control strategy.

Main Results:

• The proposed adaptive backstepping control significantly improved trajectory tracking performance.
• Reduced steady-state errors were observed compared to conventional methods.
• Enhanced robustness to external disturbances was demonstrated through experimental validation.

Conclusions:

• The developed adaptive backstepping control is effective for precise trajectory tracking in piezoactuator-driven stages.
• Experimental results confirm the feasibility and practical applicability of the proposed control scheme.