On the design of capacitive sensors using flexible electrodes for multipurpose measurements

This article evaluates the potential of capacitive measurements using flexible electrodes to access various physical quantities. These electrodes are made of a thin metallic film, typical thickness 0.2 microm, evaporated on a plastic substrate. Their large flexibility enables them to be mounted in complex geometries such as curved surfaces. In the configuration of planar condensers, using a very sensitive commercial capacitive bridge and a three-terminal measurement method, several measurements are presented. A relative resolution of 10(-8) for the thermal expansion of samples is obtained at low temperature in a differential configuration. The same technique adopted for pressure gauge measurements at low temperature led to a typical 0.1 Pa resolution over a dynamic range of 10(4) Pa. In the configuration of interleaved electrodes, condensers have been used to measure wetting by either bulk liquid helium or by thin continuous helium films in a cylindrical pipe. Both experimental and numerical evidence is provided, showing that the close proximity of a reference ground potential significantly increases the relative sensitivity to fluid wetting. Further, interleaved electrodes can be used to access both the area that is covered by a liquid film but also to determine the thickness of this film, provided it is comparable to the periodicity of the electrode pattern.