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AES investigation of inhomogenous metal-insulator samples
Gábor Dobos1, György Vida, Zoltán Tóth
1Budapest University of Technology and Economics, Department of Atomic Physics, Surface Physics Laboratory, Budafoki Street 8, Budapest, H-1111, Hungary. dobosg@eik.bme.hu
Abstract:
In this article, the secondary electron-emission properties of both vertically and laterally inhomogeneous samples are discussed. To study the effect of surface coverage, the total electron-emission yield of tungsten and niobium samples was measured as a function of primary electron energy and oxide thickness. A method is suggested to avoid charging difficulties during AES measurements of samples that consist of both metal and various insulator parts.
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