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Cl insertion on Si(100)-(2x1): etching under conditions of supersaturation

Abhishek Agrawal1, R E Butera, J H Weaver

  • 1Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.

Physical Review Letters
|May 16, 2007
PubMed

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