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Updated: Jul 14, 2026

Array Tomography Workflow for the Targeted Acquisition of Volume Information using Scanning Electron Microscopy
Published on: July 15, 2021
Subsurface near-field scanning tomography
1Institute for Physics of Microstructures of RAS, GSP-105, Nizhniy Novgorod, Russia, 603950.
Abstract:
The scanning tomography method is developed for electromagnetic sounding of a 3D structure of an inhomogeneous dielectric half-space. It is shown that known methods of physical diagnostics are suitable for this tomography with the depth of analysis from nanometers at optical frequencies up to several kilometers at ultralow frequencies. The areas of application include nanophysics, biological and medical diagnostics, subsurface remote sensing in geophysics and geology, etc. This approach is realized in the microwave scanning tomography of living tissues where a subwavelength resolution is achieved.
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