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Tomography experiment of an integrated circuit specimen using 3 MeV electrons in the transmission electron microscope

Hai-Bo Zhang1, Xiang-Liang Zhang, Yong Wang

  • 1Department of Electronic Science and Technology, Xi'an Jiaotong University, Xi'an 710049, People's Republic of China. hbzhang@mail.xjtu.edu.cn

The Review of Scientific Instruments
|May 17, 2007
PubMed

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