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Updated: Jul 14, 2026

Multi-analyte Biochip (MAB) Based on All-solid-state Ion-selective Electrodes (ASSISE) for Physiological Research
Published on: April 18, 2013
Integrated electrodes on a silicon based ion channel measurement platform
S J Wilk1, L Petrossian, M Goryll
1Arizona State University, Center for Solid State Electronics Research, Tempe, AZ 85287, USA. seth.wilk@asu.edu
Abstract:
We demonstrate the microfabrication of a low-noise silicon based device with integrated silver/silver chloride electrodes used for the measurement of single ion channel proteins. An aperture of 150 microm diameter was etched in a silicon substrate using a deep silicon reactive ion etcher and passivated with 30 nm of polytetrafluoroethylene via chemical vapor deposition. The average recorded noise in measurements of lipid bilayers was reduced by a factor of four through patterning of a 75 microm thick SU-8 layer around the aperture. Integrated electrodes were fabricated on both sides of the device and used for repeatable, stable, giga-seal bilayer formations as well as characteristic measurements of the transmembrane protein OmpF porin.
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