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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Measurement of structural intensity using boundary element method-based nearfield acoustical holography
1Technical R & D Institute, Ministry of Defense, 3-13-1 Nagase, Yokosuka, 239-0826, Japan. saijyou-kenji@com.home.ne.jp
Abstract:
The regularization method for measurement of structural intensity (SI) using boundary element method (BEM)-based nearfield acoustical holography (NAH) is proposed. Spatial derivatives of normal displacement are necessary to obtain the structural intensity. The derivative operations amplify high-wavenumber component of measurement noise and contaminate the measurement result of SI. To overcome this difficulty, regularization method for measurement of SI using fast Fourier transform-based NAH has been introduced. In this paper, this regularization method is modified for the BEM-based NAH. The BEM-based NAH avoids the aperture replication problem; therefore, measurement aperture for BEM-based NAH can be set smaller than that for FFT-based NAH. The effectiveness of the proposed method is demonstrated by experiments.
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