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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:46

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

Two-dimensional analysis of spurious modes in aluminum nitride film resonators

Xun Gong1, Min Han, Xiaoli Shang

  • 1Laboratory of Modern Acoustics, Nanjing University, Nanjing, Jiangsu 210093, China. gongxun@nju.edu.cn

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|June 19, 2007
PubMed

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